| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator that suppresses a reduction in drive efficiency to the minimum and suppresses the occurrence of detachment, floating, and cracks of electrode material even when stress occurs due to the displacement of a piezoelectric element; a manufacturing method of the piezoelectric actuator; a recording head; and an image forming apparatus.SOLUTION: An ink jet head 10 includes a nozzle plate 12 that has a nozzle 11, a liquid chamber 13 that communicates with the nozzle 11, an actuator substrate 14 that is provided with the liquid chamber 13, a diaphragm 15 that transfers vibration to the liquid chamber 13, and a piezoelectric element 16 that applies pressure to the liquid inside the liquid chamber 13. The piezoelectric element 16 includes a piezoelectric layer 17, an upper electrode 18, and a lower electrode 19. The upper electrode 18 is provided with a slit-shape stress buffering part 20 extending in a direction crossing with a direction of extension and contraction and vibration of the piezoelectric element 16 so that the upper electrode 18 is not detached from the piezoelectric layer 17.</p> |
