发明名称 TWO-DIMENSIONAL ENCODER SYSTEM AND METHOD
摘要 Two dimensional encoder system and method designed to improve accuracy, compactness, stability, resolution, and/or light efficiency of metrology carried out with such system and method. Embodiments employ a novel retroreflector which while particularly useful in present invention, is believed to have more general utility in optical imaging systems and methods.
申请公布号 US2014374579(A1) 申请公布日期 2014.12.25
申请号 US201414449371 申请日期 2014.08.01
申请人 Nikon Corporation 发明人 Goodwin Eric Peter;Smith Daniel Gene
分类号 G01D5/347;G02B5/18 主分类号 G01D5/347
代理机构 代理人
主权项
地址 Tokyo JP