WIPING PAD, AND NOZZLE MAINTENANCE APPARATUS AND COATING TREATMENT APPARATUS USING WIPING PAD

摘要

A wiping pad includes: a scraping edge provided to cross a long side direction of a discharge port and come into contact with the discharge port and nozzle side surfaces, and a lead-out passage provided ahead of the scraping edge in a moving direction along a nozzle long side direction to drain a treatment solution scraped away with the scraping edge, wherein the lead-out passage is a V-shaped groove formed along the moving direction on a pad upper surface side, and the V-shaped groove has the scraping edge formed at a rear end edge portion thereof and is formed to gradually increase in groove width and depth toward a front thereof from the scraping edge.

主权项

1. A wiping pad moved from One end side to another end side in a nozzle long side direction for wiping away a treatment solution adhering to a discharge port and nozzle side surfaces of a nozzle, the nozzle having the discharge port in a slit shape long in a width direction of a substrate to be treated and the nozzle side surfaces extending in parallel with the discharge port on both front and rear sides of the discharge port and formed in a tapered shape gradually getting thinner from a top to a bottom toward the discharge port, the wiping pad comprising:
a scraping edge provided to cross a long side direction of the discharge port and come into contact with the discharge port and the nozzle side surfaces, and a lead-out passage provided ahead of the scraping edge in a moving direction along the nozzle long side direction to drain the treatment solution scraped away with the scraping edge, wherein the lead-out passage is a V-shaped groove formed along the moving direction on a pad upper surface side, and the V-shaped groove has the scraping edge formed at a rear end edge portion thereof and is formed to gradually increase in groove width and depth toward a front thereof from the scraping edge.