| 摘要 |
PROBLEM TO BE SOLVED: To provide a load port, compatible both to a wafer and a ring frame, capable of achieving unit sharing.SOLUTION: A load port 1 includes: mounting means 20 capable of mounting accommodation means capable of accommodating a predetermined object to be accommodated; support means 30 that supports the mounting means 20; and detection means 40 capable of detecting that the object to be accommodated is mounted on the mounting means 20. The detection means 40 includes first accommodation means capable of accommodation a semiconductor wafer and second accommodation means capable of accommodating a ring frame in a way capable of differentiating. |
