| 摘要 |
PROBLEM TO BE SOLVED: To quickly measure at least one of angles and angle distribution at a plurality of positions of an object surface with a simple configuration.SOLUTION: A measurement apparatus 10 includes: a light source section 30 for sequentially emitting a plurality of light made incident to a measurement object OB and having parallel or substantially parallel optical axes, respectively; a condenser lens 32 for condensing the light reflected by the measurement object OB or the light transmitted through the measurement object OB; a light receiver 34 having a light receiving surface arranged on a rear side focal surface of the condenser lens 32, and for outputting light quantity distribution or a center-of-gravity position of the light quantity of the light received by the light receiving surface; and a measurement section 12 for measuring at least one of an angle and angle distribution of a surface of the measurement object OB on the basis of output values output from the light receiver 34 for each light applied from the light source section 30 to the measurement object OB. |
