| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint device that is advantageous in achieving alignment with high precision by measuring a relative position shift caused when a resin is cured.SOLUTION: An imprint device is configured to imprint a pattern on a resin on a substrate using a mold, and includes a detection part which detects a mark of the mold and a mark of the substrate, a drive part which changes relative positions of the mold and substrate, a curing part which cures the resin, and a control part which controls operations of the detection part, drive part, and curing part. The control part allows execution of a positioning process of carrying out positioning by controlling the drive part based upon the mark of the mold and the mark of the substrate detected by the detection part, a curing process of curing the resin with the mold in contact after the positioning process, and a detection process of finding a relative position shift between the mold and substrate after the resin curing by making the detection part detect the mark of the mold and the mark of the substrate after the curing process. |
