发明名称 WITHDRAWAL MECHANISM FOR SAMPLE HOLDING MEMBER AND IMAGE ACQUISITION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a withdrawal mechanism for sample holding member capable of securing positioning accuracy, and arranging the sample holding member easily, and an image acquisition device.SOLUTION: A pedestal 32 drives to an advance position Q1 by a pedestal drive part 33 and a reception surface 73 projects from an opening 42 of a stage 5 so as to incline downward toward a reception surface positioning part 74, at a withdrawal position P1 of a sample holding member 6 in a withdrawal mechanism 30 for the sample holding member. Thereby, in the withdrawal mechanism 30 for the sample holding member, without positioning of the sample holding member 6 by manual operation, by only placing the sample holding member 6 on the reception surface 73, using the downward inclination of the reception surface 73, positioning is performed at the reception surface positioning part 74. After positioning at the reception surface positioning part 74, when the pedestal 32 drives to a retreat position Q2 by the pedestal drive part 33, the sample holding member 6 is sent to the stage 5 from the pedestal 32, therefore the sample holding member 6 can be arranged with high accuracy easily on a mount surface 41 of the stage 5.
申请公布号 JP2014240931(A) 申请公布日期 2014.12.25
申请号 JP20130123930 申请日期 2013.06.12
申请人 HAMAMATSU PHOTONICS KK 发明人 SUZUKI YASUKI;WATANABE TOMOSHI
分类号 G02B21/26 主分类号 G02B21/26
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