| 摘要 |
PROBLEM TO BE SOLVED: To provide a process of manufacturing an optical semiconductor device, capable of easily manufacturing a laminate quantum dot structure having a plurality of quantum dot layers of different quantum dot sizes.SOLUTION: The process of manufacturing an optical semiconductor device having a laminate quantum dot formed by laminating a plurality of quantum dot layers of different quantum dot sizes composed of silicon particles includes: forming a first insulating film, composed of a silicon based insulating material containing more silicon than a stoichiometric composition, to which silicon particles are embedded; and repeating to perform a heat treatment, precipitate excessive silicon in the first insulating film to silicon particles to enlarge sizes of silicon particles. |
