OPTICAL ELEMENT, OPTICAL SYSTEM, AND OPTICAL APPARATUS

摘要

An optical element includes a substrate, and an antireflection film laminated on the substrate. The antireflection film includes, in order from the substrate side, a first layer including a plurality of dielectric thin films, a second layer including hollow particles bound by a dielectric material, and a third layer laminated on the second layer and made of a homogeneous dielectric. The hollow particles have an average particle diameter of 60 nm or less. A filling rate of the hollow particles in the second layer is 65% or higher.

主权项

1. An optical element comprising: a substrate; and an antireflection film laminated on the substrate,
wherein the antireflection film includes, in order from the substrate side, a first layer including a plurality of dielectric thin films, a second layer including hollow particles bound by a dielectric material, and a third layer laminated on the second layer and made of a homogeneous dielectric, wherein the hollow particles have an average particle diameter of 60 nm or less, and wherein a filling rate of the hollow particles in the second layer is 65% or higher.