SURFACE MEASUREMENT DEVICE

摘要

In conventional technologies in surface measurement and defect inspection, considerations are not made for the following points: (1) coarseness of resolution of spatial frequency; (2) variation of detection signal resulting from anisotropy of microroughness; and (3) variation of background signal resulting from anisotropy of microroughness. The present invention is characterized by acquiring a feature quantity about the anisotropy of the microroughness of the substrate surface. Further, the present invention is characterized by acquiring a surface state in consideration of the anisotropy of the microroughness of the substrate surface. Further the present invention is characterized by detecting a defect over the substrate in consideration of the anisotropy of the microroughness of the substrate surface.

主权项

1. A surface measurement device, comprising:
an illumination optical system for illuminating light on a sample; a plurality of detection optical systems for detecting scattered light from the sample; and a signal processing system for acquiring a continuous 2-D spatial frequency spectrum of the sample using detection signals of the detection optical systems and a library, wherein the 2-D spatial frequency spectrum is defined by two intersecting spatial frequency axes.