LINEAR EVAPORATION SOURCE AND DEPOSITION APPARATUS HAVING THE SAME

摘要

A linear evaporation source and a deposition apparatus having the same are disclosed. In one embodiment, the linear evaporation source includes i) a crucible being open on one side thereof and configured to store a deposition material and ii) a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof. The source further includes i) a nozzle section located on the open side of the crucible and comprising a plurality of nozzles, ii) a heater configured to heat the crucible and iii) a housing configured to accommodate the crucible, the nozzle section, and the heater.

主权项

1. A linear evaporation source comprising:
a crucible being open on one side thereof and configured to store a deposition material; a plurality of partitions dividing an internal space of the crucible, wherein each of the partitions has at least one opening in a lower portion thereof; a nozzle section located on the open side of the crucible and comprising a plurality of nozzles; a heater configured to heat the crucible; and a housing including a bottom facing the nozzle section, and configured to accommodate the crucible, the nozzle section, and the heater, wherein the opening includes a slit formed in a direction extending from the bottom of the housing to the nozzle section.