SUBSTRATE PROCESSING APPARATUS, DISPLAY METHOD OF THE SAME, AND PROGRAM

摘要

PROBLEM TO BE SOLVED: To provide a substrate processing apparatus capable of giving a notice to a user in order to prevent improper removal of a removable recording medium, and capable of performing confirmation on whether the recording medium can be removed on an operating screen.SOLUTION: A substrate processing apparatus comprises: control means for controlling display of an operating screen for operating information related to substrate processing; and output means of outputting the information to a removable external storing device. In the substrate processing apparatus, the control means controls so that a button for removing the fitted external storing device is arranged at a place where the button can be depressed when the external storing device has been fitted, and controls so that the button cannot be depressed when the external storing device has not been fitted.