MOVABLE BODY DRIVE METHOD AND SYSTEM, PATTERN FORMATION METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS FOR DRIVING MOVABLE BODY BASED ON MEASUREMENT VALUE OF ENCODER AND INFORMATION ON FLATNESS OF SCALE, AND DEVICE MANUFACTURING METHOD

摘要

A drive unit drives a wafer stage in a Y-axis direction based on a measurement value of an encoder that measures position information of the wafer stage in the Y-axis direction and based on information on the flatness of a scale that is measured by the encoder. In this case, the drive unit can drive the wafer stage in a predetermined direction based on a measurement value after correction in which a measurement error caused by the flatness of the scale included in the measurement value of the encoder is corrected based on the information on the flatness of the scale. Accordingly, the wafer stage can be driven with high accuracy in a predetermined direction using the encoder, without being affected by the unevenness of the scale.

主权项

1. An exposure method of exposing a substrate with an illumination light via a projection optical system, the method comprising:
placing the substrate onto a stage that is movable at least in a first direction and a second direction orthogonal to each other within a predetermined plane perpendicular to an optical axis of the projection optical system; in an encoder system having one of a grating section and a head provided at the stage and the other of the grating section and the head provided above the stage, by a plurality of the heads that face the grating section, measuring positional information of the stage in directions of six degrees of freedom including the first and the second directions; controlling a driving of the stage while compensating for a measurement error of the encoder system that occurs due to the grating section, based on measurement information of the encoder system; and switching one of the plurality of heads to another head during the driving of the stage, wherein the positional information to be measured by the another head is decided based on the positional information measured by the plurality of heads used before the switching, and after the switching, measurement by the another head is performed using the positional information that has been decided.