BELLOWS-FREE RETRACTABLE VACUUM DEPOSITION SOURCES

摘要

Systems are provided that include one or more retractable deposition source assemblies that eliminate the need for a bellows, but do not require breaking the ultra-high vacuum of a growth module for source replacement or recharging with deposition material. Systems of the present invention may include source heads that allow for a differential pumping option that provides marked improvement in base pressure around the source head (and material) that provides longer lifetimes for sources in corrosive, reactive or oxidizing environments. In addition, systems of the invention do not require an entire growth module to be vented to refill or repair an effusion source. Instead, for maintenance events that are tied to a specific source, a retractable source assembly of the present invention allows the sources to be withdrawn from the system, isolated from the growth environment, and removed without venting the entire chamber of the growth module.

主权项

1. A retractable source assembly for moving a vacuum deposition source from a first position to a second position, the retractable source assembly comprising:
an enclosure having an interior surface; a rail attached to the inside surface of the enclosure; a carriage positioned on the rail and movable along the rail between the first and second positions as driven by a driving device, the carriage comprising a source base plate for a vacuum device; the carriage comprising a first contact that can be connected to a vacuum deposition source positioned on the source base plate; a second contact fixed relative to the enclosure and that can be connected to a cable feedthrough of the enclosure; an electrical cable connected to the first contact at a first end and connected to the second contact at a second end, the electrical cable comprising predetermined slack between the first and second ends when the deposition source is in the first position; and a cable management device configured to take up the slack in the electrical cable as the carriage moves from the first position toward the second position.