发明名称 METHOD FOR FABRICATING A SUBSTRATE AND SEMICONDUCTOR STRUCTURE
摘要 The invention relates to a method for fabricating a substrate, comprising the steps of providing a donor substrate with at least one free surface, performing an ion implantation at a predetermined depth of the donor substrate to form an in-depth predetermined splitting area inside the donor substrate, and is characterized in providing a layer of an adhesive, in particular an adhesive paste, over the at least one free surface of the donor substrate. The invention further relates to a semiconductor structure comprising a semiconductor layer, and a layer of a ceramic-based and/or a graphite-based and/or a metal-based adhesive provided on one main side of the semiconductor layer.
申请公布号 US2014374886(A1) 申请公布日期 2014.12.25
申请号 US201214369594 申请日期 2012.12.21
申请人 Soitec 发明人 Kononchuk Oleg
分类号 H01L21/762;H01L21/683;H01L21/265 主分类号 H01L21/762
代理机构 代理人
主权项 1. A method for fabricating a substrate, comprising the steps of: providing a donor substrate with at least one free surface; performing an ion implantation at a predetermined depth of the donor substrate to form an in-depth predetermined splitting area inside the donor substrate; and providing a layer of an adhesive paste over the at least one free surface of the donor substrate.
地址 Bernin FR