| 摘要 |
PROBLEM TO BE SOLVED: To provide a support device which unfailingly releases the close contact state of an entire contact region.SOLUTION: A support device 2 includes: support means 3 including a support surface 31 which makes surface contact with a supported surface WK1 of a supported body WK and supports the supported body WK; close contact release means 5 which supplies a gas to a contact region AP where the supported body WK makes the surface contact with the support surface 31 to release the close contact state between the supported body WK and the support surface 31; and gas retention means 6 which retains the gas supplied to the contact region AP in the contact region AP. |
