发明名称 |
SAMPLE FIXING MEMBER FOR TIME-OF-FLIGHT SECONDARY ION MASS SPECTROMETER |
摘要 |
Provided is a sample fixing member for a time-of-flight secondary ion mass spectrometer that: can prevent the contamination of a solid sample; can stably fix the solid sample; and enables accurate detection of a secondary ion in a time-of-flight secondary ion mass spectrometer. A sample fixing member for a time-of-flight secondary ion mass spectrometer of the present invention includes a fibrous columnar structure including a plurality of fibrous columnar objects each having a length of 200 μm or more. |
申请公布号 |
US2014373646(A1) |
申请公布日期 |
2014.12.25 |
申请号 |
US201314374469 |
申请日期 |
2013.01.29 |
申请人 |
NITTO DENKO CORPORATION |
发明人 |
Maeno Youhei |
分类号 |
H01J49/02;G01N1/00 |
主分类号 |
H01J49/02 |
代理机构 |
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代理人 |
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主权项 |
1. A sample fixing member for a time-of-flight secondary ion mass spectrometer, comprising a fibrous columnar structure including a plurality of fibrous columnar objects each having a length of 200 μm or more. |
地址 |
Ibaraki-shi, Osaka JP |