发明名称 EMBOSSING COMPOUND FOR EMBOSSING LITHOGRAPHY
摘要 The invention relates to a curable embossing compound which can be used for embossing lithography, consisting of a mixture of: at least one polymerizable main component and at least one auxiliary component. The invention further relates to a use of an embossing compound according to one of the preceding claims for the primary formation of an embossing mold (4, 4', 4", 4''', 4IV).
申请公布号 WO2014202127(A1) 申请公布日期 2014.12.24
申请号 WO2013EP62711 申请日期 2013.06.19
申请人 EV GROUP E. THALLNER GMBH 发明人 CHOUIKI, MUSTAPHA
分类号 G03F7/00 主分类号 G03F7/00
代理机构 代理人
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