发明名称 PROCESS BOX, ARRANGEMENTS AND METHODS FOR PROCESSING COATED SUBSTRATES
摘要 <p>A transportable process box for processing substrates coated on one side is described. The box has a base for the placement of a first substrate in a manner such that the latter is supported over the full area, a frame, a cover which is placed onto the frame, and an intermediate element which is arranged between the base and the cover and is intended for the placement of a second substrate in a manner such that the latter is supported over the full area. Arrangements and methods for processing substrates are also described.</p>
申请公布号 EP2815426(A1) 申请公布日期 2014.12.24
申请号 EP20130707567 申请日期 2013.02.08
申请人 SAINT-GOBAIN GLASS FRANCE 发明人 FÜRFANGER, MARTIN;PHAN, DANG CUONG;JOST, STEFAN
分类号 H01L21/673;H01L21/67 主分类号 H01L21/673
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