发明名称 |
PROCESS BOX, ARRANGEMENTS AND METHODS FOR PROCESSING COATED SUBSTRATES |
摘要 |
<p>A transportable process box for processing substrates coated on one side is described. The box has a base for the placement of a first substrate in a manner such that the latter is supported over the full area, a frame, a cover which is placed onto the frame, and an intermediate element which is arranged between the base and the cover and is intended for the placement of a second substrate in a manner such that the latter is supported over the full area. Arrangements and methods for processing substrates are also described.</p> |
申请公布号 |
EP2815426(A1) |
申请公布日期 |
2014.12.24 |
申请号 |
EP20130707567 |
申请日期 |
2013.02.08 |
申请人 |
SAINT-GOBAIN GLASS FRANCE |
发明人 |
FÜRFANGER, MARTIN;PHAN, DANG CUONG;JOST, STEFAN |
分类号 |
H01L21/673;H01L21/67 |
主分类号 |
H01L21/673 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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