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经营范围
发明名称
In-line Sputtering System
摘要
<p>인라인 스퍼터링 시스템이 개시된다. 본 발명의 인라인 스퍼터링 시스템는, 기판에 대한 히팅 공정이 수행되는 히팅 챔버와, 히팅 챔버에 마련되며, 히팅 챔버의 내부에서 기판을 이송하는 이송유닛과, 히팅 챔버에 마련되며, 기판을 가열하는 히팅유닛과, 히팅 챔버에 마련되며, 히팅유닛의 가열에 대하여 이송유닛의 일부를 차폐하는 차폐유닛을 포함한다.</p>
申请公布号
KR101473829(B1)
申请公布日期
2014.12.24
申请号
KR20120155042
申请日期
2012.12.27
申请人
发明人
分类号
C23C14/34;H01L21/203;H01L51/50
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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