| 摘要 |
This MEMS sensor module, and especially this vibration drive module, have the following: a movable electrode that is vibratably supported and that extends in a vibration direction; a fixed electrode that is disposed substantially in parallel with the movable electrode, and that extends in the vibration direction; a plurality of protrusions that are provided close to each other in a row, parallel to the vibration direction, on an opposing wall surface of the movable electrode which faces the fixed electrode; and a plurality of protrusions that face the protrusions of the movable electrode and are provided on an opposing wall surface of the fixed electrode which faces the movable electrode. |
