| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method for producing a cluster which efficiently produce a cluster of core-shell structure at high speed.SOLUTION: The apparatus for producing a cluster includes a plurality of target materials 21-23, each having respective ablation surfaces 31-33 aligned and oriented in the same direction; a laser means which simultaneously irradiates laser 51-53 with a certain repetition frequency to the ablation surfaces 31-33; and a gas means which flows carrier gas 15 along and parallel to the ablation surfaces 31-33. In the target materials 21 and 22 arranged adjacent to each other in the flow direction of the carrier gas 15, a plume P1 is generated when the upstream target material 21 is irradiated with laser 51. A core is formed in the plume P1 while the plume P1 is carried to a position above the downstream target material 22 by the carrier gas 15, and a shell due to the plume P2 generated by the downstream target 22 is formed around the core. |
