| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser processing device that can not only inhibit formation of a processing damage but also form a division starting point for dividing the workpiece more surely. SOLUTION: The laser processing device including a light source to emit a pulse laser beam and a stage where a workpiece is placed further includes a transparent member disposing means which can dispose a transparent member, which is transparent to the pulse laser beam used for processing the workpiece, adjacent to the processed surface of the workpiece placed on the stage and forms the starting point for dividing the workpiece by sequentially creating a cleavage or dehiscence of the workpiece between the irradiated areas each other and by irradiating the pulse laser beam to the workpiece while continuously and relatively moving the stage and the light source so that each of the irradiated areas per unit pulse beam of the pulse laser beam is discretely formed on the processed surface under the conditions of the workpiece placed on the stage and the transparent member disposed adjacent to the processed surface. COPYRIGHT: (C)2013,JPO&INPIT |
