| 摘要 |
PROBLEM TO BE SOLVED: To provide a filler which has a low dielectric constant and a low dielectric loss tangent and is useful for a substrate or an interlayer insulating film constituting a circuit substrate. SOLUTION: A porous inorganic oxide has a cubic pore structure and has a specific surface area of 10 m<SP POS="POST">2</SP>/g or less determined by nitrogen adsorption. COPYRIGHT: (C)2012,JPO&INPIT |
