CARBONYL FLUORIDE PURIFICATION METHOD

摘要

The present invention relates to the technical field of fluoride chemical industry and electronic industry gas, and provides a carbonyl fluoride purification method. The purification method comprises: performing light component removal and heavy component removal for COF2 crude product gas, wherein during light component removal, the temperature at the bottom of a purification device ranges from -112°C to -48°C and the pressure ranges from 0.01 MPa to 0.6 MPa, and the temperature at the top is lower than that at the bottom by 0.5-30°C; and during the heavy component removal, the temperature at the bottom of the purification device ranges from -81°C to 80°C and the pressure ranges from 0.01 MPa to 0.6 MPa, and the temperature at the top is lower than that at the bottom by 0.5-30°C, to obtain preliminarily rectified mixed gas; and then performing rectification and purification once again, wherein the temperature at the bottom of the purification device ranges from -123°C to -36°C and the pressure ranges from 0.01 MPa to 1.03 MPa, and the temperature at the top is lower than that at the bottom by 0.2-45°C, to obtain purified gas. The purified gas is especially applicable to purification of COF2 crude product gas containing much CO2, the purity of COF2 in the purified gas is greater than or equal to 99%, and the CO2 content is less than 1000 ppm.