| 摘要 |
<p>A detecting apparatus. The detecting apparatus comprises a body (100), a rack (202), a shooting unit (210), a light emitting unit (300), and a light receiving unit (400). The shooting unit (210) is movably disposed on the rack (202). The shooting unit (210) is located above a to-be-detected substrate (100). The light emitting unit (300) and the light receiving unit (400) are separately located at opposite sides of the to-be-detected substrate (100). The light emitting unit (300) is used for irradiating light along a top surface of the to-be-detected substrate (100). The light receiving unit (400) is used for receiving the light irradiated by the light emitting unit (300).The detecting apparatus can determine existence of a foreign matter on a basis that whether the irradiated light is shielded as well as a shielded degree, thereby reliably preventing a nozzle from being damaged. Also provided is a detecting method.</p> |
