发明名称 ポリイミドおよびこれを含む感光性樹脂組成物
摘要 <p>The present invention provides polyimide applied to the buffer coating of semiconductors and a photosensitive resin composition including the same. The polyimide is a polyimide polymer represented by Chemical Formula 1 below. Further, the present invention provides a photosensitive resin composition, including 1) BDA-series soluble polyimide having an i-ray permeability of 70% or more; 2) a polyamic acid having elongation of 40% or more; 3) a novolak resin, and 4) diazonaphthoquinone-series photosensitive substance and having a high resolution, high sensitivity, an excellent film characteristic, and mechanical physical properties which are the requirements of semiconductor buffer coating.</p>
申请公布号 JP5645138(B2) 申请公布日期 2014.12.24
申请号 JP20110547830 申请日期 2010.07.16
申请人 发明人
分类号 C08G73/10;G03F7/004;G03F7/023;H01L21/027;H01L21/312 主分类号 C08G73/10
代理机构 代理人
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