| 摘要 |
PROBLEM TO BE SOLVED: To improve rotational accuracy in nanometer order of a rotating body. SOLUTION: A static pressure gas bearing has a thrust part 19 in which a rotating body 24 projects to a radial direction of a rotating shaft 20 in a flange shape. One face of the thrust part 19 and the other face thereof are parallel to a virtual plane 21 which intersects orthogonally with the rotating shaft 20. In a housing 12, one porous body 13 and the other porous body 14 are respectively arranged on sites opposite to one face of the thrust part 19 and the other face thereof. An outflow of gas from the porous bodies 13 and 14 is varied depending on opening amounts of holes on surfaces of the porous bodies to compensate for non-uniform distances of surfaces of the porous bodies 13 and 14 from the virtual plane. COPYRIGHT: (C)2012,JPO&INPIT |
