发明名称 保管装置と保管方法
摘要 <p>A storage unit (2) includes: carousels (4, 6) each including a plurality of levels (9, 41) and including a plurality of spaces (8, 40) for storing containers (10, 54) on each level (9, 41), the carousels (4, 6) rotating around a vertical shaft (12); a loading port (34) for loading and unloading the containers (10, 54); transport units (28, 29) for transporting the containers (10, 54) between the loading port (34) and the storage spaces (8, 40); and pipes (58, 63) for feeding clean gas such that feeding is turned on and off for each storage space (8, 40), the pipes (58, 63) being configured to be connected to an intake port (55) provided for each container (10, 54).</p>
申请公布号 JP5645094(B2) 申请公布日期 2014.12.24
申请号 JP20130522523 申请日期 2012.05.17
申请人 村田機械株式会社 发明人 福島 正純
分类号 B65G1/133;B65G1/00;B65G49/06;H01L21/673 主分类号 B65G1/133
代理机构 代理人
主权项
地址