发明名称 光学装置及び反射要素を方向付ける方法
摘要 An optical apparatus has a moveable reflective element and associated actuator. The actuator includes a first magnet which is connected to the moveable reflective element such that movement of the first magnet will cause the moveable reflective element to move, and a second magnet which is connected to a motor such that operation of the motor will cause the second magnet to move. The second magnet is positioned relative to the first magnet such that moving the second magnet will cause the first magnet to move.
申请公布号 JP5646632(B2) 申请公布日期 2014.12.24
申请号 JP20120525944 申请日期 2010.04.09
申请人 发明人
分类号 H01L21/027;G02B7/182;G02B7/198;G02B17/08;G02B19/00;G03F7/20 主分类号 H01L21/027
代理机构 代理人
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