METHOD FOR PRODUCING A PLURALITY OF STRUCTURES

摘要

This method comprises the steps of a) providing a chamber (10) suitable for receiving a plurality of structures (S), b) circulating a gas stream (F) in the chamber (10) such that the chamber (10) has a non-oxidising atmosphere, c) heat treating the plurality of structures (S) at a temperature higher than a threshold value above which the oxygen present in the dielectric oxide diffuses through the active layer, reacts with the semi-conductive material of the active layer, and produces a volatile material, the method being remarkable in that step b) is carried out such that the gas stream (F) has a circulation speed between the plurality of structures (S) higher than the speed of diffusion of the volatile material in the gas stream.