发明名称 |
PUMP DEVICE, AND METHOD FOR CONTROLLING SAME |
摘要 |
<p>[Object] To provide a pump device capable of stabilizing a suction flow rate irrespective of an outside air temperature and a control method therefor. [Solving Means] The control method for a pump device includes: outputting a drive signal for driving a motor at a rotation speed for discharging gas of the reference flow rate from the suction port of the pump main body; measuring a temperature of gas discharged from the suction port or a temperature of the pump main body by a temperature sensor attached to the pump main body; calculating an actual flow rate of the gas discharged from the suction port based on a temperature signal relating to the temperature of the gas included in an output of the temperature sensor; and correcting the drive signal such that the actual flow rate equals the reference flow rate and outputting the corrected drive signal to the motor.</p> |
申请公布号 |
EP2816234(A1) |
申请公布日期 |
2014.12.24 |
申请号 |
EP20120868599 |
申请日期 |
2012.02.16 |
申请人 |
ULVAC KIKO, INC. |
发明人 |
NONOMURA, YUJI;SUZUKI, SACHIE;ITOYAMA, RYUJI;YAMANAKA, AKIHIRO |
分类号 |
F04B49/06;F04B43/02;F04B45/04;F04B49/10;F04B53/10 |
主分类号 |
F04B49/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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