发明名称 PUMP DEVICE, AND METHOD FOR CONTROLLING SAME
摘要 <p>[Object] To provide a pump device capable of stabilizing a suction flow rate irrespective of an outside air temperature and a control method therefor. [Solving Means] The control method for a pump device includes: outputting a drive signal for driving a motor at a rotation speed for discharging gas of the reference flow rate from the suction port of the pump main body; measuring a temperature of gas discharged from the suction port or a temperature of the pump main body by a temperature sensor attached to the pump main body; calculating an actual flow rate of the gas discharged from the suction port based on a temperature signal relating to the temperature of the gas included in an output of the temperature sensor; and correcting the drive signal such that the actual flow rate equals the reference flow rate and outputting the corrected drive signal to the motor.</p>
申请公布号 EP2816234(A1) 申请公布日期 2014.12.24
申请号 EP20120868599 申请日期 2012.02.16
申请人 ULVAC KIKO, INC. 发明人 NONOMURA, YUJI;SUZUKI, SACHIE;ITOYAMA, RYUJI;YAMANAKA, AKIHIRO
分类号 F04B49/06;F04B43/02;F04B45/04;F04B49/10;F04B53/10 主分类号 F04B49/06
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