发明名称 OPTICAL COMPONENT
摘要 <p>An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein each of the regulating devices in each case has at least one capacitive sensor having at least one moveable electrode and at least one electrode arranged rigidly relative to the carrying structure.</p>
申请公布号 EP2815278(A2) 申请公布日期 2014.12.24
申请号 EP20130705754 申请日期 2013.02.14
申请人 CARL ZEISS SMT GMBH 发明人 WALDIS, SEVERIN;JASSMANN, MARCO;ATAMAN, CAGLAR;BOSTOCK, ROGER, MARC;DENG, JIAN;LANI, SEBASTIAN;KNAUF, BENEDIKT
分类号 G03F7/20;G02B26/08 主分类号 G03F7/20
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