TIP HOLDER UNIT, TIP HOLDER, PIN, WHEEL TIP, AND SUBSTRATE PROCESSING APPARATUS

摘要

Provided is a tip holder capable of fixedly maintaining a wheel tip. The tip holder is formed of a wheel tip (2) and a tip holder (4A) holding the wheel tip (2) by a wheel shaft (3) inserted and penetrating through a shaft insertion penetration hole (1). A main holder body (4) of the tip holder (4A) has left and right holding units having surfaces facing each other while having a groove (5) fitted in between. The wheel shaft (3) is attached through attachment holes (8, 9) to the holding units (6, 7). The wheel shaft (3) is formed of a small diameter portion (3a), a tapered portion (3b), and a large diameter portion (3c). The circumferential surface of the small diameter portion (3a) is slidably fitted into the shaft insertion penetration hole (1). A guide surface (1a) is formed on an edge portion of the shaft insertion penetration hole (1) opening toward one side surface of the wheel tip (2). The tapered portion (3b) of the wheel shaft (3) comes in contact with the guide surface (1a). The wheel tip (2) is supported by the wheel shaft (3) to be rotatable while a side surface (2a) on the opposite side from the guide surface (1a) of the wheel tip (2) comes in contact with a surface (6a) of a holding member (6) on one side.