| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma device which stably generates plasma in a desired form using various kinds of plasma gas, and can be used in various surface treatments. <P>SOLUTION: The plasma device includes a plasma generating chamber, which is in communication with an exterior portion through an exhaust port, and at least one plasma source 6 which generates plasma in the plasma generating chamber. The plasma device ejects the plasma generated in the plasma generating chamber from the exhaust port. The plasma source 6 includes a pair of electrodes 9 and 10 which are arranged to face each other, and a clearance forming a discharger 13 is provided between the electrodes 9 and 10. The plasma source is formed so that plasma gas, flowing in an airflow direction C which forms an angle with a discharge direction B, is supplied to the discharger 13. <P>COPYRIGHT: (C)2012,JPO&INPIT |
