发明名称 磁気デバイスおよびその製造方法
摘要 PROBLEM TO BE SOLVED: To prevent deterioration of a magnetic device due to damage introduced by a magnetic tunnel junction. SOLUTION: The magnetic device comprises a lower electrode 28 provided with a recess 26 in the upper surface, a magnetic tunnel junction layer 30 formed on the inner surface of the recess in the lower electrode and on the lower electrode on the outside of the recess, and including a tunnel barrier layer and a magnetization fixed layer and a magnetization free layer sandwiching a tunnel barrier layer vertically, and an upper electrode 40 formed on the magnetic tunnel junction layer so as not to reach the side surface of the magnetic tunnel junction layer. COPYRIGHT: (C)2012,JPO&INPIT
申请公布号 JP5644493(B2) 申请公布日期 2014.12.24
申请号 JP20100293770 申请日期 2010.12.28
申请人 发明人
分类号 H01L43/08;H01L21/8246;H01L27/105;H01L29/82 主分类号 H01L43/08
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