| 摘要 |
PROBLEM TO BE SOLVED: To provide a spectroscopic measurement device capable of measuring a wavelength spectrum of reflected light from an object appropriately at measurement timing. SOLUTION: A first imaging optical system 12 includes three microlens arrays respectively having different lens pitches, an aperture system 13 includes three aperture members respectively having different aperture pitches, and a spectroscopic system 15 includes three diffraction elements respectively having different lattice pitches. An arbitrary one of the microlens arrays may be placed on an optical path of reflected light by using a driving device 123, an arbitrary one of the aperture members may be placed on the optical path of the reflected light by using a driving device 133, and an arbitrary one of the diffraction elements may be placed on the optical path of the reflected light by using a driving device 153. COPYRIGHT: (C)2012,JPO&INPIT |
