| 发明名称 |
DEVICE AND METHOD FOR ALIGNING SUBSTRATES |
| 摘要 |
The invention relates to a method for aligning and contacting a first substrate (15) with a second substrate (15') using several detection units and to a corresponding device. |
| 申请公布号 |
WO2014202106(A1) |
申请公布日期 |
2014.12.24 |
| 申请号 |
WO2013EP62473 |
申请日期 |
2013.06.17 |
| 申请人 |
EV GROUP E. THALLNER GMBH |
发明人 |
THALLNER, ERICH |
| 分类号 |
H01L21/67;H01L21/68 |
主分类号 |
H01L21/67 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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