| 摘要 |
<p>[Problem] To provide an encoder, a motor provided with an encoder, and a servo system that are capable of enhancing detection accuracy. [Solution] An encoder (100) has a slit track (ST) having a plurality of reflecting slits (111) arranged along the circumferential direction (C) of a disk and has an optical module (130) capable of moving relative to the slit track (ST) in the circumferential direction (C) of the disk while opposing a portion of the slit track (ST). The optical module (130) has a light source (131) for irradiating light onto the opposing portion of the slit track (ST), a light receiving array (PA) having a plurality of light receiving elements (142) that are arranged along the circumferential direction (C) of the disk and receive reflected light reflected by each of the reflecting slits (111), and a slit array (SA) having a plurality of transmitting slits (166) that are disposed between the slit track (ST) and the light receiving array (PA), are arranged along the circumferential direction (C) of the disk, and transmit the reflected light (L1) reflected by each of the reflecting slits (111).</p> |
