| 摘要 |
<p>Apparatus for coating a surface of an article with a thin film polymer layer by plasma deposition, comprising (i) a plurality of processing chambers into which articles can be placed; (ii) means for supplying, to the processing chambers, a species capable of being formed into a plasma; (iii) a plasma forming means operable to establish an electrical field internally of the processing chambers so as to form a plasma when said species is supplied thereto; (iv) means for providing a time varying electric current to the plasma forming means; and (v) pressure varying means for selectively controlling pressure in said processing chambers such that pressure in any one or more of said chambers can be controlled independently of pressure in another of said chambers, wherein the processing chambers are supported for movement between a loading or unloading position and a processing position.</p> |
