Method for providing a monolithic shield for a magnetic recording transducer

摘要

A method fabricates a magnetic transducer. A sacrificial leading shield is provided on an etch stop layer. A nonmagnetic layer is provided on the sacrificial leading shield. A pole trench is formed in the nonmagnetic layer and on the sacrificial leading shield. A pole is formed. The pole has a bottom and a top wider than the bottom in a pole tip region. Part of the pole in the pole tip region is in the pole trench and at the ABS location. The sacrificial leading shield and part of the nonmagnetic layer adjacent to the pole are removed. An air bridge thus resides in place of the sacrificial leading shield between the portion of the pole and the etch stop layer. As least one shield layer is provided. The at least one shield layer substantially fills the air bridge and form a monolithic shield including a leading and side shields.

主权项

1. A method for fabricating a magnetic transducer having an air-bearing surface location (ABS location) corresponding to an air-bearing surface (ABS), the method comprising:
providing an etch stop layer; providing a sacrificial leading shield on the etch stop layer, the sacrificial leading shield having a beveled surface and including NiFe; providing a nonmagnetic layer, a portion of the nonmagnetic layer on the sacrificial leading shield; providing a pole trench in the nonmagnetic layer, the pole trench having a shape and location corresponding to the pole, the pole trench residing on the sacrificial leading shield; forming a pole having a pole tip region, the pole having a bottom and a top wider than the bottom in the pole tip region, a portion of the pole in the pole tip region residing in the pole trench and at the ABS location; removing a portion of the nonmagnetic layer adjacent to the pole and the sacrificial leading shield such that an air bridge resides in place of the sacrificial leading shield between the portion of the pole and the etch stop layer; and providing at least one shield layer, the at least one shield layer substantially filling the air bridge and forming a monolithic shield including a leading shield and at least one side shield.