Methods and systems for control of a surface modification process

摘要

A method and system for modifying a substrate, such a thin film, solar panel or the like detects error and/or variance and, if needed, re-optimizes the product design and/or process parameters on the fly, so that product can meet the product specification. This allows for methods and systems of process control that can adaptively change the product design in real time.

主权项

1. A computer-assisted method of making a product having a predetermined product specification and an initial product design which defines at least a partial structure of the product, the method comprising:
(a) modifying a surface of a substrate to form an intermediate product; (b) measuring in real time, at least one measured parameter of said intermediate product; (c) comparing in real time, said at least one measured parameter with at least one target parameter; (d) in response to the result of the comparing step, employing a revised product design that is in accordance with the product specification; (e) continuing manufacture of the product based on the revised product design; and (f) repeating steps (a)-(e) until said predetermined product specification is reached; wherein steps (b)-(d) transpire as said surface continues to be modified and the product's product design is revised during the course of manufacture.