Optical filter including a step section, and analytical instrument and optical apparatus using the optical filter

摘要

An optical filter includes a first substrate, a second substrate, a first reflecting film disposed on a first opposed surface of the first substrate, a second reflecting film disposed on a second opposed surface of the second substrate, a first electrode provided to the first substrate at a peripheral position of the first reflecting film in a plan view, and a second electrode provided to the second substrate and opposed to the first electrode. At least one of the first opposed surface and the second opposed surface is provided with a step section, and an initial gap between the first reflecting film and the second reflecting film is smaller than an initial gap between the first electrode and the second electrode, to thereby allow control of the gap between the reflecting films with good accuracy.

主权项

1. An optical filter comprising:
a first substrate; a second substrate opposed to the first substrate; a first reflecting section disposed on a first opposed surface of the first substrate, the first opposed surface being opposed to the second substrate; a second reflecting section disposed on a second opposed surface of the second substrate, the second opposed surface being opposed to the first substrate, and the second reflecting section being opposed to the first reflecting section; a first electrode disposed on the first opposed surface of the first substrate at a peripheral position relative to the first reflecting section in a plan view; and a second electrode disposed on the second opposed surface of the second substrate, and opposed to the first electrode, wherein at least one of the first opposed surface and the second opposed surface includes a step section, the first electrode is divided into K segment electrodes electrically isolated from each other, where K is an integer ≧2, the second electrode is a common electrode having the same electrical potential, and in a state that no voltage is applied between the first electrode and the second electrode, a first gap between the first reflecting section and the second reflecting section is smaller than a second gap between the first electrode and the second electrode.