Mask frame assembly for thin film deposition

摘要

A mask frame assembly includes an air tunnel between a frame and a mask so as to allow flow of air. Therefore, evaporation of cleaning liquid can be facilitated in gaps between the frame and the mask during cleaning and drying processes performed so as to reuse the mask frame assembly sooner. Thus, the amount of remaining cleaning liquid can be reduced so as to reduce the time necessary for preparation of a subsequent process using the mask frame assembly.

主权项

1. A mask frame assembly for depositing a thin film, comprising:
a frame having a central void; and a mask supported by the frame, the mask comprising a connection part joined to a deposition pattern positioned inside the central void, a plurality of air tunnels formed in a junction which is between the connection part and the frame and by which the connection part and the frame contact each other, each air tunnel directly connected to only the central void of the frame.