Measurement apparatus

摘要

In a measurement apparatus, higher-quality measurement is realized in measurement of measurement object displacement or imaging of a two-dimensional image. In a controller, a light receiving signal of a photodiode is supplied to a displacement measuring unit of a sensor head in order to measure a height of a measurement object, and the height of a surface of the measurement object is measured based on the light receiving signal. Then, in the controller, image obtaining timing is determined based on the height of the measurement object. Specifically, a focus adjustment value corresponding to the computed height of the measurement object is obtained from the table, and an image obtaining signal is transmitted to an imaging device at the timing the focus adjustment value is realized. Therefore, a length between two points on the measurement object is computed from the thus obtained image based on the height of the measurement object.

主权项

1. A measurement apparatus comprising one or more controllers configured to form the following components:
a displacement measuring unit configured to measure displacement of a surface of a measurement object; an image obtaining unit configured to obtain a two-dimensional image of the measurement object with an imaging device; and an image measuring unit configured to compute a length between two points on the measurement object from the obtained image by computing a correction factor based on the displacement measured by the displacement measuring unit, the correction factor being for converting a length between the two points in the obtained image into the actual length between the two points; a storage unit configured to store the correction factor and the displacement measured by the displacement measuring unit.