发明名称 SEED ETCHANT FOR WIRING WITH HIGH ASPECT RATIO
摘要 <p>The present invention relates to etchant of nickel, chromium, or nickel-chromium alloy suitable for forming a wire with a high aspect ratio, and extending the service life of the etchant by inhibiting the elution amount of copper. Moreover, the etchant of nickel, chromium, or nickel-chromium alloy is prepared by mixing a first solution containing hydrochloric acid and a metal halogen compound, and a second solution containing nitrogen oxide or a salt thereof. The first solution is characterized by containing an inhibitor to inhibit dissolution of copper, or a surfactant, or an inhibitor and a surfactant.</p>
申请公布号 KR101475892(B1) 申请公布日期 2014.12.23
申请号 KR20130089292 申请日期 2013.07.29
申请人 ACM INC. 发明人 KU, KENG HOIE;KIM, WOO JIN;JI, MYOUNG JIN;YUN, UI HAG
分类号 C23F1/26;C09K13/00 主分类号 C23F1/26
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