| 主权项 |
1. A yaw rate sensor, comprising:
a substrate, which has a main plane of extension; a detection arrangement; and a Coriolis element, wherein the Coriolis element is excitable to a vibration along a third direction, which is perpendicular to the main plane of extension, wherein a Coriolis deflection of the Coriolis element along a first direction, which is parallel to the main plane of extension, is detectable using the detection arrangement; wherein the detection arrangement includes a Coriolis electrode, which is connected to the Coriolis element, and a corresponding counterelectrode, and wherein the Coriolis electrode and the counterelectrode move together along the third direction responsive to the vibration along the third direction; wherein the drive frame has a first partial region and a second partial region, wherein the counterelectrode is connected to the first partial region, and a further counterelectrode of the detection arrangement which corresponds to a further Coriolis electrode of the detection arrangement is connected to the second partial region, and wherein at least one the following is satisfied: (i) the first partial region is electrically insulated with respect to the second partial region, and (ii) the counterelectrode is electrically insulated with respect to the further counterelectrode; and wherein the first partial region has a first section and a second section, which is electrically insulated from the first section, wherein the counterelectrode included a first counterelectrode, which is connected to the first section, and a second counterelectrode which is connected to the second section, and wherein the second partial region has a third section and a fourth section which is electrically insulated from the third section, and wherein the further counterelectrode includes a third counterelectrode, which is connected to the third section, and a fourth counterelectrode, which is connected to the fourth section. |
