| 摘要 |
<p>Provided is a monochromator following below configurations. A plurality of inclined guide paths (22) extending horizontally on a main body frame (4) and having an inclined top surface is arranged to be spaced apart from each other in a direction from the front to the back. A medium effector (30) integrated with a plurality of inclined coupling holes (32) having the bottom surface inclined to correspond to the top surface of the inclined guide path (22) is installed to slide on the inclined guide path (22). An ultra-high vacuum chamber (6), having first and second multiplayer mirrors therein, is installed to slide on the medium effector (30). A support plate (20) is fixedly combined to the main body frame (4). An operation rod unit (50) and a side-to-side driving unit (40) driving the operation rod unit (50) to move linearly side to side are installed at one side of the support plate (20), and the operation rod unit (50) is combined to a chamber (6) so that a side-to-side sliding movement of the chamber (6) can be controlled by an operation of a chamber side-to-side driving unit (40). A chamber lift driving unit (60) making the medium effector (30) slide from side to side is combined to the other side of the support plate (20) so that an operation of the chamber lift driving unit (60) can control an ascent and a descent of the chamber (6).</p> |
