| 摘要 |
An ion source includes a magnetic field part, an electrode, and a gas injection part. One side of the magnetic field part which faces an object is opened and the other side thereof is closed. A plurality of magnetic poles are alternately arranged on the opened side and a magnetic core is connected to the closed side to form an acceleration closed loop of a plasma electron in the opened side. An electrode is formed on the lower side of the acceleration closed loop of the magnetic field part to be separated from the magnetic field part. A gas injection part passes through the magnetic pole and supplies gas in the direction of the acceleration closed loop. |
