Variable wavelength interference filter, optical module, and optical analyzer

摘要

A variable wavelength interference filter includes: a first reflective film disposed on a face of a first substrate facing a second substrate; a second reflective film disposed on a face of the second substrate facing the first substrate and the first reflective film; a first electrode disposed on the face of the first substrate; and a second electrode disposed on the face of the second substrate. The second substrate includes a movable portion on which the second reflective film is disposed and a connection maintaining portion maintaining the movable portion to be movable in a substrate thickness direction, the connection maintaining portion circumscribes the movable portion and is thinner than the movable portion, and the second electrode is disposed on a portion of the second substrate that is thicker than the connection maintaining portion.

主权项

1. A variable wavelength interference filter comprising:
a first substrate; a substrate that faces the first substrate; a first reflective film that is disposed on a first face of the first substrate that faces the second substrate; a second reflective film that is disposed on a second face of the second substrate, the second reflective film being separated from the first reflective film by a gap; a first electrode that is disposed on the first face; a second electrode that is disposed on the second face, the second electrode facing the first electrode; a third electrode that is disposed on the first face; and a fourth electrode that is disposed on the second face, the fourth electrode facing the third electrode, wherein the second substrate includes:
a bonding portion that is bonded to the first substrate;a movable portion on which the second reflective film is disposed; anda connection maintaining portion that extends between the bonding portion and the movable portion, maintains the movable portion so as to be movable in a direction normal to a reflective surface of the first reflective film facing a reflective surface of the second reflective film, wherein the connection maintaining portion is continuously formed so as to circumscribe the movable portion and has a first thickness along an entire length thereof that is less than that of the movable portion; wherein the second electrode and the fourth electrode are disposed on a portion of the second substrate that has a second thickness that is greater than the first thickness; wherein the second electrode and the fourth electrode circumscribe the second reflective film inside the bonding portion in a plan view; the second electrode is disposed between the second reflection film and the fourth electrode in plan view; and wherein the first and second thicknesses are in the direction normal to the reflective surface of the first reflective film facing the reflective surface of the second reflective film.